Title:
CONTACT DETECTING DEVICE AND CONTACT DETECTING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/018739
Kind Code:
A1
Abstract:
Provided are a method and a device for accurately detecting a contact between a mechanical probe and a subject to be brought into contact therewith. A contact detecting device is provided with: a mechanical probe (3) which can move to be in contact with the subject to be brought into contact therewith; a charged particle beam source (2) which generates a charged particle beam to be applied to the subject; a detector (12) for detecting secondary particles or reflected particles from the subject; calculating devices (17, 18) which calculate a feature quantity of a mechanical probe shadow projected on the subject, based on a detection signal obtained from the detector; and a control device (19) which controls operation of the mechanical probe. The calculating devices calculate a shadow depth S (x, y) as the feature quantity of the mechanical probe, and based on the shadow depth S(x, y), an evaluation value J(z), which indicates the distance between the subject and the mechanical probe, is obtained.
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| JPH01264158 | CHARGED PARTICLE BEAM DEVICE |
| JPS63191012 | DIMENSION MEASURING APPARATUS USING ELECTRON BEAM |
Inventors:
MORITA KAZUHIRO (JP)
UMEMURA KAORU (JP)
UMEMURA KAORU (JP)
Application Number:
PCT/JP2009/063159
Publication Date:
February 18, 2010
Filing Date:
July 23, 2009
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
MORITA KAZUHIRO (JP)
UMEMURA KAORU (JP)
MORITA KAZUHIRO (JP)
UMEMURA KAORU (JP)
International Classes:
H01J37/22; G01B15/00; H01J37/28; H01L21/66
Foreign References:
| JP2002040107A | 2002-02-06 | |||
| JP2003157787A | 2003-05-30 | |||
| JP2006066478A | 2006-03-09 |
Attorney, Agent or Firm:
HIRAKI YUSUKE (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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