Title:
CONTAMINANT DEPOSITION CONTROL BAFFLE WITH CAPACITANCE DIFFERENCE PRESSURE TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2004/104543
Kind Code:
A1
Abstract:
A deposition controlling baffle (250) is (additionally) provided. Its apertures conduct contaminants to regions of a membrane (160) of inner capacitor (127a) and outer capacitor (127b) so that the difference will cancel the effect of contaminants. Instead of eliminating contaminants as much as possible from reaching diaphragm (160) the above baffle (250) steers contaminants to the diaphragm (160) in a predetermined pattern so as to minimize the effect that such contaminants can have on performance of the transducer.
Inventors:
LISCHER JEFFREY D (US)
TRAVERSO ROBERT (US)
TRAVERSO ROBERT (US)
Application Number:
PCT/US2004/014639
Publication Date:
December 02, 2004
Filing Date:
May 10, 2004
Export Citation:
Assignee:
MKS INSTR INC (US)
LISCHER JEFFREY D (US)
TRAVERSO ROBERT (US)
LISCHER JEFFREY D (US)
TRAVERSO ROBERT (US)
International Classes:
G01L9/00; G01L19/06; (IPC1-7): G01L19/06; C23C16/00; G01L9/12; H01L21/00
Foreign References:
| US6443015B1 | 2002-09-03 | |||
| US5811685A | 1998-09-22 | |||
| US6451159B1 | 2002-09-17 | |||
| US5808206A | 1998-09-15 | |||
| US5948169A | 1999-09-07 | |||
| US20030167852A1 | 2003-09-11 |
Attorney, Agent or Firm:
Goldenberg, Richard A. (LLP 60 State Stree, Boston MA, US)
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