Title:
CONTROL DEVICE FOR SUBSTRATE-TRANSPORT ROBOT AND CONTROL METHOD FOR SUBSTRATE-TRANSPORT ROBOT
Document Type and Number:
WIPO Patent Application WO/2023/204143
Kind Code:
A1
Abstract:
This control device controls a substrate-transport robot having a hand, a joint, and a joint motor. The hand is capable of holding a substrate. The shaft of the joint is oriented vertically. The joint motor drives the joint. The control device controls the joint motor so as to allow the substrate to pass along a first sensor and a second sensor while the hand is transporting the substrate. The control is performed such that the orientation of the hand, in a plan view while the substrate passes along the two sensors, is inclined relative to a direction perpendicular to a straight line connecting the two sensors. The control device generates positional deviation information indicating the positional deviation of the substrate relative to the hand on the basis of positions of the hand obtained by at least three-time detections of the outer edge of the substrate by any of multiple sensors including the two sensors.
Inventors:
IMANISHI HIROKI
KITANO SHINYA
NAKAYA ATSUSHI
KITANO SHINYA
NAKAYA ATSUSHI
Application Number:
PCT/JP2023/015073
Publication Date:
October 26, 2023
Filing Date:
April 13, 2023
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J9/10
Foreign References:
| JP2017139249A | 2017-08-10 | |||
| JP2008264980A | 2008-11-06 | |||
| JP2019201112A | 2019-11-21 | |||
| JPH11243131A | 1999-09-07 | |||
| JP2000068359A | 2000-03-03 | |||
| JP2009500869A | 2009-01-08 | |||
| US6405101B1 | 2002-06-11 | |||
| JPH10173022A | 1998-06-26 |
Attorney, Agent or Firm:
KATSURAGAWA, Naoki (JP)
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