Title:
CRUCIBLE FOR METAL THIN FILM DEPOSITION AND EVAPORATION SOURCE FOR METAL THIN FILM DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2017/104885
Kind Code:
A1
Abstract:
An aspect of the present invention provides a crucible for metal thin film deposition, in which a vaporized material of a metal is contained and melted then sublimated by heating to form a metal thin film on a substrate, the crucible comprising: a body part of a container shape with an open upper end; and a stepped part extending inward from an inner wall of the body part so as to form a first melting hole in a depth direction at the center of the body part, wherein a plurality of second melting holes are concentrically formed along the stepped part around the first melting hole.
Inventors:
PARK HYUN SIK (KR)
CHOI JAE SOO (KR)
OH YOUNG MAN (KR)
CHOI JAE SOO (KR)
OH YOUNG MAN (KR)
Application Number:
PCT/KR2015/014031
Publication Date:
June 22, 2017
Filing Date:
December 21, 2015
Export Citation:
Assignee:
SUNIC SYSTEM LTD (KR)
International Classes:
H01L51/56; H01L21/22; H01L21/324; H01L21/67; H01L51/00
Foreign References:
| JPH0733305B2 | 1995-04-12 | |||
| KR20080013686A | 2008-02-13 | |||
| KR20130073407A | 2013-07-03 | |||
| KR20140042656A | 2014-04-07 | |||
| KR20130073406A | 2013-07-03 |
Attorney, Agent or Firm:
ZENA PATENT LAW FIRM (KR)
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