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Title:
CURABLE COMPOSITION FOR PERMANENT RESIST FILMS, AND PERMANENT RESIST FILM
Document Type and Number:
WIPO Patent Application WO/2016/114000
Kind Code:
A1
Abstract:
Provided are: a curable composition which is particularly suitable for obtaining permanent resist films, exhibits excellent solubility in a solvent, and is capable of obtaining coating films exhibiting excellent alkaline development properties, thermal decomposition resistance, light sensitivity, and resolution; and a permanent resist film obtained using said curable composition. Specifically provided are: a curable composition for permanent resist films which includes a phenolic hydroxyl group-containing compound (A) having a molecular structure represented by structural formula (1) (in structural formula (1), R1 represents hydrogen, an alkyl group, or an aryl group, n represents an integer in the range of 2-10, R2 represents an alkyl group, an alkoxy group, an aryl group, an aralkyl group, or a halogen, m represents an integer in the range of 0-4, and, in cases when m is two or higher, the plurality of R2s may be the same as each other or different to each other, and may be bonded to either of the two aromatic rings of a naphthylene skeleton), and a photosensitizer (B1) or a curing agent (B2); and a permanent resist film obtained by curing said composition.

Inventors:
IMADA TOMOYUKI (JP)
Application Number:
PCT/JP2015/082512
Publication Date:
July 21, 2016
Filing Date:
November 19, 2015
Export Citation:
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Assignee:
DAINIPPON INK & CHEMICALS (JP)
International Classes:
G03F7/022; C07C39/14; C08G8/04
Domestic Patent References:
WO2015008560A12015-01-22
Foreign References:
JP2012162474A2012-08-30
JP2013253146A2013-12-19
JP2003201324A2003-07-18
JP2005023210A2005-01-27
JPS61130947A1986-06-18
US4551409A1985-11-05
Other References:
PARIS E. GEORGHIOU ET AL.: "Calixnaphthalenes: Deep, electron-rich naphthalene ring-containing calixarenes.", THE FIRST DECADE., SYNLETT, 2005, pages 879 - 891
Attorney, Agent or Firm:
KONO MICHIHIRO (JP)
Michihiro Kono (JP)
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