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Title:
CURED PRODUCT MANUFACTURING METHOD, LAMINATE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, RESIN COMPOSITION, CURED PRODUCT, LAMINATE, AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/008049
Kind Code:
A1
Abstract:
Provided are: a cured product manufacturing method whereby a cured product having excellent adhesion with metal can be obtained; a laminate manufacturing method that uses the cured product manufacturing method; and a semiconductor device manufacturing method. Provided are: a resin composition whereby a cured product having excellent adhesion with metal can be obtained; a cured product obtained by curing the resin composition; a laminate that includes the cured project; and a semiconductor device. This cured product manufacturing method includes a film forming step and a heating step for heating the film at a heating temperature of 180°C or lower. The film after the heating step is raised in temperature from 25°C to 260°C at a speed of 10°C/minute, is maintained at 260°C for 15 minutes, and the mass loss ratio when the temperature is raised from 260°C to 300°C at a speed of 10°C/minute is 15% or lower. The cyclization rate of a cyclized resin obtained from a precursor of the cyclized resin in the obtained cured product is 95% or higher.

Inventors:
NOZAKI ATSUYASU (JP)
TAKASHIMA MISAKI (JP)
Application Number:
PCT/JP2022/025647
Publication Date:
February 02, 2023
Filing Date:
June 28, 2022
Export Citation:
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Assignee:
FUJIFILM CORP (JP)
International Classes:
G03F7/037; C08G73/10; G03F7/004; G03F7/027; G03F7/028; G03F7/20; G03F7/32
Domestic Patent References:
WO2020071437A12020-04-09
WO2018151195A12018-08-23
WO2016194769A12016-12-08
Foreign References:
JPH0683049A1994-03-25
Attorney, Agent or Firm:
YONEKURA Junzo et al. (JP)
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