Title:
CVD FILM-FORMING DEVICE AND METHOD OF MANUFACTURING CVD FILM COATING PLASTIC CONTAINER
Document Type and Number:
WIPO Patent Application WO/2005/035825
Kind Code:
A1
Abstract:
A CVD film-forming device capable of forming a film by applying a self-bias voltage without being restricted by the shape of a plastic container and preventing dust from adhering to electrodes. The CVD film-forming device is characterized by comprising the container side electrode concurrently served in a vacuum chamber having a space for storing the container and capable of storing the container in the space so that container internal gas does not cross container outside gas, the mouth side electrode disposed above the opening of the container in the insulated state from the container side electrode, an internal gas lead-in tube formed of an insulation material detachably disposed in the container and leading the gas in the container such as raw material gas into the container, a container internal gas supply means, a container outside gas supply means supplying the container external gas such as the raw material gas to the outside of the container in the space, an exhaust means exhausting the container internal gas, and a high frequency supply means supplying high frequencies to the container side electrode.
Inventors:
TAKEMOTO KEISHU (JP)
KAGE TSUYOSHI (JP)
KOBAYASHI TAKUMI (SG)
SHIRAKURA AKIRA (JP)
KAGE TSUYOSHI (JP)
KOBAYASHI TAKUMI (SG)
SHIRAKURA AKIRA (JP)
Application Number:
PCT/JP2004/013464
Publication Date:
April 21, 2005
Filing Date:
September 15, 2004
Export Citation:
Assignee:
MITSUBISHI SHOJI PLASTICS CORP (JP)
YOUTEC CO LTD (JP)
KIRIN BREWERY (JP)
TAKEMOTO KEISHU (JP)
KAGE TSUYOSHI (JP)
KOBAYASHI TAKUMI (SG)
SHIRAKURA AKIRA (JP)
YOUTEC CO LTD (JP)
KIRIN BREWERY (JP)
TAKEMOTO KEISHU (JP)
KAGE TSUYOSHI (JP)
KOBAYASHI TAKUMI (SG)
SHIRAKURA AKIRA (JP)
International Classes:
B65D1/00; B65D1/02; B65D23/02; B65D23/08; C23C16/04; C23C16/505; (IPC1-7): C23C16/505; B65D1/00
Domestic Patent References:
| WO2002085717A1 | 2002-10-31 | |||
| WO2003085165A1 | 2003-10-16 | |||
| WO2003102263A1 | 2003-12-11 | |||
| WO2003101847A1 | 2003-12-11 |
Foreign References:
| JP2001213419A | 2001-08-07 | |||
| JP2002371364A | 2002-12-26 | |||
| JP2003081240A | 2003-03-19 | |||
| JP2002212728A | 2002-07-31 | |||
| JP2001335945A | 2001-12-07 | |||
| JP2002046726A | 2002-02-12 | |||
| JP2002053119A | 2002-02-19 |
Attorney, Agent or Firm:
Imashita, Katsuhiro (Setoguchi Bldg. 3rd FL. 12-5, Nishi-shimbashi 2-chom, Minato-ku Tokyo, JP)
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