Title:
DEPOSITION APPARATUS AND RECOVERY APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/073908
Kind Code:
A1
Abstract:
At least a part of a deposition preventing board (3) and a shutter (4) is formed by connecting a plurality of small pieces (3a, 3b, 4a, 4b), and each of the small pieces (3a, 3b, 4a, 4b) is provided with a connecting section with which the small pieces can be connected together and separated from each other.
Inventors:
SONODA TOHRU
KAWATO SHINICHI
INOUE SATOSHI
HASHIMOTO SATOSHI
KAWATO SHINICHI
INOUE SATOSHI
HASHIMOTO SATOSHI
Application Number:
PCT/JP2011/077433
Publication Date:
June 07, 2012
Filing Date:
November 28, 2011
Export Citation:
Assignee:
SHARP KK (JP)
SONODA TOHRU
KAWATO SHINICHI
INOUE SATOSHI
HASHIMOTO SATOSHI
SONODA TOHRU
KAWATO SHINICHI
INOUE SATOSHI
HASHIMOTO SATOSHI
International Classes:
C23C14/00; C23C14/24; H01L51/50; H05B33/10
Foreign References:
| JPH06196476A | 1994-07-15 | |||
| JP2008081770A | 2008-04-10 | |||
| JPS6230877A | 1987-02-09 | |||
| JP2003064470A | 2003-03-05 | |||
| JPH10168561A | 1998-06-23 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
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Claims: