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Title:
DIFFRACTION OPTICAL ELEMENT, AND ALIGNER EQUIPPED WITH THAT ELEMENT
Document Type and Number:
WIPO Patent Application WO/2007/119840
Kind Code:
A1
Abstract:
A pupil filter for use in the illumination optical system such as an aligner for semiconductor is provided in which exposure efficiency of semiconductor is enhanced by preventing the quantity of illumination light passing the pupil filter from decreasing, the load is reduced when correction by light proximity effect is carried out, dimensions of a pattern formed on a wafer are not varied by mask pattern pitch, and a stabilized high resolution optical image is obtained. A diffraction optical element for forming the pupil filter employed in the illumination optical system of an aligner for irradiating a mask with light from a light source through the illumination optical system, and projection exposing the pattern on the mask onto a substrate to be exposed through a projection optical system, characterized in that the pupil filter formed by the diffraction optical element is a double pole pupil equipped with two light transmitting portions (11), the two light transmitting portions (11) each has a sectoral profile symmetrical over a predetermined distance from the center of the pupil filter, a low light transmittance region (12) exists between the two light transmitting portions (11), and the outside of the two light transmitting portions (11) and the low light transmittance region (12) is a shading portion (13).

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Inventors:
TOYAMA NOBUHITO (JP)
HORIGUCHI RYUJI (JP)
Application Number:
PCT/JP2007/058227
Publication Date:
October 25, 2007
Filing Date:
April 10, 2007
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD (JP)
TOYAMA NOBUHITO (JP)
HORIGUCHI RYUJI (JP)
International Classes:
H01L21/027; G02B5/18; G02B5/32; G03F7/20
Foreign References:
JP2001217188A2001-08-10
JP2000058441A2000-02-25
JP2002334836A2002-11-22
JP2005093522A2005-04-07
JP2005268489A2005-09-29
JP2001174615A2001-06-29
JP2005243953A2005-09-08
US20050046945A12005-03-03
EP1577709A22005-09-21
US20030156266A12003-08-21
Other References:
See also references of EP 2006885A4
Attorney, Agent or Firm:
NIRASAWA, Hiroshi et al. (Ueno-Suzuki Bldg. 7th Floor16-3, Ueno 3-Chom, Taito-Ku Tokyo 05, JP)
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