Title:
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK MEMBER
Document Type and Number:
WIPO Patent Application WO/2023/120254
Kind Code:
A1
Abstract:
This electrostatic chuck member comprises: a dielectric substrate that is provided with a placement surface on which a sample is placed, the direction orthogonal to the placement surface being the thickness direction; and an adsorption electrode embedded inside the dielectric substrate. Inside the dielectric substrate, a gas flow path extending along the planar direction of the placement surface is provided. The inner surface of the gas flow path is provided with a bottom surface facing the same direction as the placement surface, a top surface opposite the bottom surface, and a pair of side surfaces connecting the bottom surface and the top surface. At least one of the pair of side surfaces is inclined with respect to the thickness direction.
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Inventors:
ICHIYOSHI TAKU (JP)
INUI SATOYOSHI (JP)
OTSUKA TAKESHI (JP)
INUI SATOYOSHI (JP)
OTSUKA TAKESHI (JP)
Application Number:
PCT/JP2022/045535
Publication Date:
June 29, 2023
Filing Date:
December 09, 2022
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
H02N13/00; C04B37/00; H01L21/683
Foreign References:
| JP2015220385A | 2015-12-07 | |||
| JP2021028961A | 2021-02-25 | |||
| JP2001096454A | 2001-04-10 | |||
| JP2006188428A | 2006-07-20 | |||
| KR20150077094A | 2015-07-07 | |||
| JP2014187214A | 2014-10-02 | |||
| US20200066564A1 | 2020-02-27 | |||
| JP2017208527A | 2017-11-24 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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