Title:
EXPOSURE DEVICE AND EXPOSURE METHOD, AND FLAT-PANEL DISPLAY MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/057560
Kind Code:
A1
Abstract:
A control system acquires grid correction information relating to at least two of scales (152a-152c) in a first grid group and scales (152d-152f) in a second grid group on the basis of position information of a mobile body measured using at least four heads (66a-66d) from which a measurement beam is irradiated onto at least two of the scales (152a-152c) and scales (152d-152f). The grid correction information is used in movement control of the mobile body using at least three heads from which a measurement beam is irradiated onto at least two of the scales (152a-152c) and scales (152d-152f).
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Inventors:
SHIRATO AKINORI (JP)
SHIBUYA TAKASHI (JP)
SHIBUYA TAKASHI (JP)
Application Number:
PCT/JP2016/078799
Publication Date:
April 06, 2017
Filing Date:
September 29, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; G01B11/00
Domestic Patent References:
| WO2014054690A1 | 2014-04-10 | |||
| WO2013150788A1 | 2013-10-10 | |||
| WO2009028157A1 | 2009-03-05 | |||
| WO2008026742A1 | 2008-03-06 | |||
| WO2007083758A1 | 2007-07-26 |
Foreign References:
| JP2012060117A | 2012-03-22 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
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