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Title:
FILM FORMATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/080030
Kind Code:
A1
Abstract:
A film formation apparatus according to the present invention comprises: a chamber (10) into and from which a film formation gas is introduced and vented, and in which a film is formed on a to-be-processed object via the film formation gas; and a film conveyance unit (100), which is disposed within the chamber (10) and roll-to-roll conveys an elongated film F constituting the to-be-processed object. The film conveyance unit (100) comprises a rotatable roller (130), a portion of a circumferential surface thereof being contacted by the elongated film F, and a nozzle tube (200) for spraying an inert gas onto a region, of the roller (130), not covered by the elongated film F.

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Inventors:
SATO EIJI (JP)
SAKAMOTO HITOSHI (JP)
Application Number:
PCT/JP2019/036700
Publication Date:
April 23, 2020
Filing Date:
September 19, 2019
Export Citation:
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Assignee:
CREATIVE COATINGS CO LTD (JP)
International Classes:
C23C16/44
Foreign References:
JP2012184492A2012-09-27
JPH08209329A1996-08-13
JP2009209381A2009-09-17
JPH10298764A1998-11-10
JP2008182386A2008-08-07
Attorney, Agent or Firm:
INOUE Hajime et al. (JP)
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