FILM-FORMING MASK AND METHOD FOR PRODUCING FILM-FORMING MASK

WIPO Patent Application WO/2015/002129

A1

The present invention is configured so as to be equipped with: a resinous film (1) for forming a plurality of opening patterns (4) passing therethrough, and equipped on one surface thereof with a frame-shaped metal thin-film (5) having an opening sized so as to encompass the plurality of opening patterns (4); a metal mask (2) which is provided separately so as to be independent from the film (1) and positioned on the one-surface (1a) side of the film (1) in a location corresponding to the opening in the metal thin-film (5), and is provided with a plurality of through-holes (6) each sized so as to encompass at least one opening pattern (4) of the plurality of opening patterns (4); and a metal frame (3) which is positioned on the one-surface (1a) side of the film (1), is formed in a frame-shape provided with an opening (7) sized so as to encompass the plurality of through-holes (6) in the metal mask (2), and supports the film (1) and the metal mask (2) by having one end surface (3a) thereof spot-welded to a section of the metal thin-film (5) and an edge region of the metal mask (2) while the film (1) and the metal mask (2) are being stretched.

JP2006045632	VAPOR DEPOSITION APPARATUS
JPH06299338	PRODUCTION OF COATED METALLIC SHEET PLATED WITH AL BY VAPOR DEPOSITION AND EXCELLENT IN REFLECTING CHARACTERISTIC
JP2023071013	METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK

MIZUMURA MICHINOBU (JP)

PCT/JP2014/067332

January 08, 2015

June 30, 2014

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V TECHNOLOGY CO LTD (JP)

C23C14/24; H01L51/50; H05B33/10

JP2013083704A	2013-05-09
JP2013095992A	2013-05-20
JP2006188748A	2006-07-20

OGAWA, Moriaki et al. (JP)
Moriaki Ogawa (JP)

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