Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/171729
Kind Code:
A1
Abstract:
A fluid control device (10) is provided with a piezoelectric pump (21), a piezoelectric pump (22), a container (40), and a control unit (60). The piezoelectric pump (21) and the piezoelectric pump (22) are connected to each other in series. The piezoelectric pump (21) is on the upstream side and the piezoelectric pump (22) is on the downstream side. The control unit (60) controls driving of the piezoelectric pump (21) and the piezoelectric pump (22). The control unit (60) sets the start timing of driving the piezoelectric pump (22) on the upstream side earlier than the start timing of driving the piezoelectric pump (21) on the downstream side.
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Inventors:
OKAGUCHI KENJIRO (JP)
ACHIWA HIROKI (JP)
ACHIWA HIROKI (JP)
Application Number:
PCT/JP2020/045558
Publication Date:
September 02, 2021
Filing Date:
December 08, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B43/02; F04B43/04; F04B49/02; F04B49/10
Domestic Patent References:
| WO2019198305A1 | 2019-10-17 | |||
| WO2018142975A1 | 2018-08-09 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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