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Title:
GAS LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/123714
Kind Code:
A1
Abstract:
A gas laser apparatus according to an aspect of the present disclosure comprises: a main discharge circuit that supplies a main discharge voltage for generating a main discharge between a pair of main discharge electrodes disposed inside a laser chamber; and a preliminary ionization circuit that supplies a preliminary ionization voltage for generating a corona discharge in a preliminary ionization electrode disposed inside the laser chamber. The main discharge circuit comprises a step-up pulse transformer, a main capacitor and a switch connected to the primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to the secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the main discharge electrodes and connected in parallel to the first capacitor via the first magnetic switch. The interval between the time at which the discharge of corona is started and the time at which the main discharge is started is 30-60 ns.

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Inventors:
YAMANOUCHI YOUICHI (JP)
UMEDA HIROSHI (JP)
NAGAI KAZUKI (JP)
UEYAMA TAKESHI (JP)
Application Number:
PCT/JP2020/045982
Publication Date:
June 16, 2022
Filing Date:
December 10, 2020
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/097; H01S3/0977; H01S3/104
Domestic Patent References:
WO2016152738A12016-09-29
Foreign References:
JPH0992917A1997-04-04
JPH0429382A1992-01-31
JPH0690047A1994-03-29
JPH0846275A1996-02-16
JPH11177171A1999-07-02
JPH0864892A1996-03-08
JP2000252566A2000-09-14
JP2000077754A2000-03-14
US4797888A1989-01-10
US20080285607A12008-11-20
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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