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Title:
HETERODYNE LASER DOPPLER PROBE AND MEASUREMENT SYSTEM USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2006/093209
Kind Code:
A1
Abstract:
There is provided a heterodyne laser Doppler probe capable of realizing both of the photoexciting efficiency and the speed measurement efficiency. A measurement system using the heterodyne laser Doppler probe is also disclosed. The heterodyne laser Doppler probe introduces excitation light for photoexcitation from a first optical path (2) to an optical probe (1) and measurement light for the heterodyne laser Doppler measurement from a second optical path (4) to the optical probe (1). The excitation light is emitted from the first optical path (2) and introduced via a reflection mirror (3), a beam splitter (6), to a focal lens (7) and then to a measurement object (excitation object) (8). On the other hand, the measurement light for the heterodyne laser Doppler measurement is emitted from the second optical path (4) and passes through a 1/4 wavelength plate (5). A rectilinearly polarized light is converted into a circularly polarized light and introduced via a beam splitter (6) and the focal lens (7) to the measurement object (excitation object) (8). The measurement light (signal light) reflected by the measurement object (excitation object) (8) passes through the same route to reach the 1/4 wavelength plate (5). In the 1/4 wavelength plate (5), the measurement light is converted from the circularly polarized light to linearly polarized light and the linearly polarized measurement light is returned via the second optical path (4) to the heterodyne laser Doppler measurement device.

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Inventors:
KAWAKATSU HIDEKI (JP)
Application Number:
PCT/JP2006/303934
Publication Date:
September 08, 2006
Filing Date:
March 02, 2006
Export Citation:
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Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
KAWAKATSU HIDEKI (JP)
International Classes:
G01B11/00; G01B21/30; G01Q20/02
Foreign References:
JP2003114182A2003-04-18
JPH04136743A1992-05-11
JP2004125540A2004-04-22
JPH10142241A1998-05-29
JPH07225975A1995-08-22
JPH0712545A1995-01-17
JPH06185977A1994-07-08
JPH04102008A1992-04-03
Other References:
OSHIO T. ET AL.: "Atomic Force Microscope Using an Optical Fiber Heterodyne Interferometer Free from External Disturbances", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 32, no. 6B. PART 1, 30 June 1993 (1993-06-30), pages 2994 - 2998, XP000487438
Attorney, Agent or Firm:
Shimizu, Mamoru (11-12 Kanda-mitoshiro-cho, Chiyoda-ku Tokyo 53, JP)
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