Title:
ILLUMINATION FIELD NON-UNIFORMITY DETECTION SYSTEM AND DETECTION METHOD, CORRECTION METHOD, AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/021449
Kind Code:
A1
Abstract:
The present disclosure provides an illumination field non-uniformity detection system and detection method, a correction method, and a device. The system comprises: a displacement control module which is used for controlling a displacement table to drive a photoelectric detector and an image sensor to move in illumination fields; an illumination signal acquisition module which is used for controlling the photoelectric detector to acquire different response signals at different acquisition frequencies and controlling the image sensor to acquire response images; a data processing module which is used for obtaining, according to the different response signals, a plurality of illumination fields having different illumination radiation intensities and having illumination intensity distributions considered to be uniform, obtaining a plurality of corrected image sensor grayscale matrixes on the basis of the plurality of illumination fields considered to be uniform, and fitting the plurality of corrected image sensor grayscale matrixes to obtain a parameter matrix; and a non-uniformity detection module which is used for correcting the response images according to the parameter matrix, and representing the non-uniformity of the illumination intensity distributions in the illumination fields by using a non-uniformity index of the grayscale distributions of the corrected response images. The system achieves systematic detection.
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Inventors:
LUO XIANGANG (CN)
ZHAO LIXIN (CN)
HE YU (CN)
LI YI (CN)
WU SIHAN (CN)
FENG JINHUA (CN)
SHAO HONGYU (CN)
ZHANG SHAOYU (CN)
ZHAO LIXIN (CN)
HE YU (CN)
LI YI (CN)
WU SIHAN (CN)
FENG JINHUA (CN)
SHAO HONGYU (CN)
ZHANG SHAOYU (CN)
Application Number:
PCT/CN2022/139681
Publication Date:
February 01, 2024
Filing Date:
December 16, 2022
Export Citation:
Assignee:
INST OPTICS & ELECTRONICS CAS (CN)
International Classes:
G01J1/02; G01J1/42; G01J1/44; G06T3/40; G06T7/62
Foreign References:
| CN115265772A | 2022-11-01 | |||
| CN115265767A | 2022-11-01 | |||
| CN112304424A | 2021-02-02 | |||
| CN107036710A | 2017-08-11 | |||
| US20070262235A1 | 2007-11-15 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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