Title:
IMAGE MEASUREMENT DEVICE, STRUCTURE MANUFACTURING METHOD, IMAGE MEASUREMENT METHOD, AND IMAGE MEASUREMENT PROGRAM
Document Type and Number:
WIPO Patent Application WO/2016/067423
Kind Code:
A1
Abstract:
An image measurement device of the present invention measures the shape of an object to be measured on the basis of an image obtained by performing image pickup of the object to be measured. The image measurement device has a storage control unit that stores an image corresponding to at least one among a plurality of teaching procedures for producing a procedure for measuring the object to be measured.
Inventors:
KADOMOTO SHINGO (JP)
Application Number:
PCT/JP2014/078967
Publication Date:
May 06, 2016
Filing Date:
October 30, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01B11/00
Foreign References:
| JP2014109479A | 2014-06-12 | |||
| JP2011237279A | 2011-11-24 | |||
| JP2008256500A | 2008-10-23 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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