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Title:
IMPRINT DEVICE AND IMPRINT TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2012/014869
Kind Code:
A1
Abstract:
The present invention is an imprint device and a transfer method therefor, whereby recess and projection shapes present on the surface of a stamper are transferred to transfer-receiving object by irradiating the transfer-receiving object with energy, and the stamper is detached from the transfer-receiving object. The transfer process is carried out by: applying pressure to a first back side of the stamper and/or the transfer-receiving object with a flat pressure-applying object; applying pressure to a second back side of the stamper and/or transfer-receiving object with a fluid; and controlling the pressure applied by the flat pressure-applying object and the pressure applied by the fluid, and the timing that pressure is applied.

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Inventors:
SHIRAISHI TOSHIMITSU (JP)
YAMASHITA NAOAKI (JP)
AOKI MASASHI (JP)
Application Number:
PCT/JP2011/066918
Publication Date:
February 02, 2012
Filing Date:
July 26, 2011
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
SHIRAISHI TOSHIMITSU (JP)
YAMASHITA NAOAKI (JP)
AOKI MASASHI (JP)
International Classes:
H01L21/027; B29C59/02
Foreign References:
JP2007083626A2007-04-05
JP2007287942A2007-11-01
JP2003516644A2003-05-13
JP2010506427A2010-02-25
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
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