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Title:
ABERRATION CORRECTION DEVICE AND CHARGED PARTICLE BEAM DEVICE EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO/2012/014870
Kind Code:
A1
Abstract:
To provide an aberration correction device and a charged particle beam device employing same that are jointly usable with a tunneling electron microscope (TEM) and a scanning tunneling electron microscope (STEM), an aberration correction device (1) comprises, between a TEM objective lens (6a) and an STEM objective lens (6b): a transfer lens group (4, 5), for transferring a coma-free surface (11) of the TEM objective lens (6a) to a multipolar lens (3); a transfer lens group (7, 8) for transferring the coma-free surface of the TEM object lens to a multipolar lens (2); and a transfer lens (13) for correcting fifth-order spherical aberration of the STEM objective lens (6b).

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Inventors:
HIRAYAMA YOICHI (JP)
Application Number:
PCT/JP2011/066919
Publication Date:
February 02, 2012
Filing Date:
July 26, 2011
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
HIRAYAMA YOICHI (JP)
International Classes:
H01J37/153; H01J37/28
Foreign References:
JP2002510431A2002-04-02
JPH03295140A1991-12-26
JP2007128656A2007-05-24
JP2007157719A2007-06-21
JP2009245841A2009-10-22
JP2009224067A2009-10-01
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
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Claims:



 
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