Title:
LAMINATED ULTRA-HIGH VACUUM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/002320
Kind Code:
A1
Abstract:
Provided is an ultra-high vacuum forming device containing an ion pump having a compact size in the central axis direction. The ultra-high vacuum forming device (1) is provided with at least one ion pump (100). The ion pump (100) is provided with: a casing (110) having at least one opening (111, 112); a board-shaped electrode group (120) formed by means of a central opening (120a) being formed along a predetermined central axis (C) disposed within the casing (110), and a plurality of electrodes (121) being joined with spaces therebetween; a pair of board-shaped electrodes (131, 132) having a different polarity than that of the electrode group (120) and that are disposed at positions sandwiching both sides of the electrode group (120) within the casing (110); and a pair of board-shaped magnets (141, 142) disposed at positions sandwiching both sides of the pair of board-shaped electrodes (131, 132).
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Inventors:
TANAKA SHUKICHI (JP)
Application Number:
PCT/JP2015/062082
Publication Date:
January 07, 2016
Filing Date:
April 21, 2015
Export Citation:
Assignee:
NAT INST INF & COMM TECH (JP)
International Classes:
H01J41/18; H01J41/20
Foreign References:
| JPS61168549U | 1986-10-18 | |||
| JPS5253513A | 1977-04-30 | |||
| JPH0759943B2 | 1995-06-28 |
Other References:
See also references of EP 3163599A4
Attorney, Agent or Firm:
HIROSE, TAKAYUKI (JP)
Takayuki Hirose (JP)
Takayuki Hirose (JP)
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