Title:
LASER APPARATUS AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/085146
Kind Code:
A1
Abstract:
A laser apparatus according to the present invention comprises: a first actuator that adjusts an oscillation wavelength of a pulsed laser beam; a second actuator that adjusts a spectral line width of the pulsed laser beam; and a processor that reads data specifying a difference between a shortest wavelength and a longest wavelength and a number of radiation pulses of the pulsed laser beam to be radiated onto one location of a to-be-irradiated object, determines a target spectral line width, controls the second actuator on the basis of the target spectral line width, and controls the first actuator such that the oscillation wavelength cyclically changes between the shortest wavelength and the longest wavelength for each radiation pulse.
Inventors:
KUMAZAKI TAKAHITO (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2020/039674
Publication Date:
April 28, 2022
Filing Date:
October 22, 2020
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/136; G03F7/20
Domestic Patent References:
| WO2020095418A1 | 2020-05-14 | |||
| WO2017068619A1 | 2017-04-27 | |||
| WO2017098625A1 | 2017-06-15 | |||
| WO2006079078A2 | 2006-07-27 |
Foreign References:
| JP2013179247A | 2013-09-09 | |||
| US7565084B1 | 2009-07-21 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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