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Title:
LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/153704
Kind Code:
A1
Abstract:
A laser device includes: a fundamental wave laser oscillator (20) and a wavelength conversion unit (40) that generate a laser beam; a case (1) for hermetically storing the fundamental wave laser oscillator (20) and the wavelength conversion unit (40); an adsorption section (5) that is installed within the case (1) and is for adsorption of harmful gas; a closed-loop pipe (10) that is connected to an exhaust opening (8) and an air supply opening (9) of the case (1); a pump (11) for circulating gas inside the case (1) using the closed-loop pipe (10); and a gas pressure adjustment valve (14) that adjusts the pressure of the gas inside the case (1) and is provided between the pump (11) and the air supply opening (9). By means of this configuration, it is possible to decrease an effect of the harmful gas even when the device is stopped, without consuming power, and without requiring waiting time when the device starts.

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Inventors:
FURUTA KEISUKE (JP)
MORITA DAIJI (JP)
KONNO SUSUMU (JP)
KUBA KAZUKI (JP)
NISHIMAE JUNICHI (JP)
FUJIKAWA SHUICHI (JP)
Application Number:
PCT/JP2012/082222
Publication Date:
October 17, 2013
Filing Date:
December 12, 2012
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
FURUTA KEISUKE (JP)
MORITA DAIJI (JP)
KONNO SUSUMU (JP)
KUBA KAZUKI (JP)
NISHIMAE JUNICHI (JP)
FUJIKAWA SHUICHI (JP)
International Classes:
H01S3/02
Foreign References:
JP2006504252A2006-02-02
JP2000124534A2000-04-28
JP2004535068A2004-11-18
JP2005502209A2005-01-20
JP2005033040A2005-02-03
JP2003249702A2003-09-05
JP2008147649A2008-06-26
JPH0521868A1993-01-29
JP2003258337A2003-09-12
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
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