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Title:
LASER IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/098174
Kind Code:
A1
Abstract:
This laser irradiation device may be provided with: a laser device that outputs a pulsed laser beam; a beam scanning optical system that splits the pulsed laser beam to a plurality of optical paths, said pulsed laser beam having been outputted from the laser device; a plurality of beam homogenizers, which are respectively disposed to the optical paths, and respectively homogenize the light intensity distributions of the pulsed laser beams split to the optical paths; and a control unit that controls the beam scanning optical system such that the pulsed laser beam outputted from the laser device is split to the optical paths by each pulse.

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Inventors:
KAKIZAKI KOUJI (JP)
SUWA AKIRA (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2014/083183
Publication Date:
June 23, 2016
Filing Date:
December 15, 2014
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/13; H01S3/101; H01S3/225
Foreign References:
JP2007189209A2007-07-26
JPH11125839A1999-05-11
JP2011143421A2011-07-28
JP2013121605A2013-06-20
JP2003086505A2003-03-20
US20040137731A12004-07-15
Attorney, Agent or Firm:
HOSAKA Nobuhisa et al. (JP)
Hosaka Prolongation of life (JP)
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