Title:
LIGHT DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/090200
Kind Code:
A1
Abstract:
In the present invention, a spectroscopic sensor is provided with: a wiring substrate having a principal surface; a photodetector disposed on the principal surface of the wiring substrate; a Fabry-Pérot interference filter; a spacer that is provided on the principal surface of the wiring substrate and supports the Fabry-Pérot interference filter such that the Fabry-Pérot interference filter and the photodetector are separated from each other; and a stem connected to ground potential. Between the Fabry-Pérot interference filter and the stem, a second current path is formed, which has a smaller electric resistance than any first current path which runs from the Fabry-Pérot interference filter to the photodetector, through the spacer and the wiring substrate.
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Inventors:
OYAMA HIROKI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
HIROSE MASAKI (JP)
KAWAI TOSHIMITSU (JP)
KURAMOTO YUMI (JP)
SHIBAYAMA KATSUMI (JP)
KASAHARA TAKASHI (JP)
HIROSE MASAKI (JP)
KAWAI TOSHIMITSU (JP)
KURAMOTO YUMI (JP)
Application Number:
PCT/JP2019/033079
Publication Date:
May 07, 2020
Filing Date:
August 23, 2019
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01J3/26; G01J1/04; G02B5/28; G02B26/00; H01L23/02; H05K1/02
Domestic Patent References:
| WO2018159533A1 | 2018-09-07 | |||
| WO2018030486A1 | 2018-02-15 | |||
| WO2018203495A1 | 2018-11-08 |
Foreign References:
| JPH05322653A | 1993-12-07 | |||
| JP2013026518A | 2013-02-04 | |||
| JP2015087445A | 2015-05-07 | |||
| JP2015087445A | 2015-05-07 |
Other References:
See also references of EP 3875931A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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