LIQUID FOR REMOVING DEGENERATED METAL LAYER AND METHOD FOR REMOVING DEGENERATED METAL LAYER

Title:

LIQUID FOR REMOVING DEGENERATED METAL LAYER AND METHOD FOR REMOVING DEGENERATED METAL LAYER

Document Type and Number:

WIPO Patent Application WO/2005/019499

Kind Code:

A1

Abstract:

A liquid for removing a degenerated metal layer formed on a conductive metal is disclosed which contains a hydrogen fluoride, an organic solvent and water such that the weight ratio of hydrogen fluoride : organic solvent : water is 0.001-10 wt% : 70-99.998 wt% : 0.001-20 wt%.

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Inventors:

NAKAMURA SHINGO (JP)
MINAMI SHINICHI (JP)
KANEMURA TAKASHI (JP)
ITANO MITSUSHI (JP)
KEZUKA TAKEHIKO (JP)
KAMIYA FUMIHIRO (JP)

Application Number:

PCT/JP2004/012144

Publication Date:

March 03, 2005

Filing Date:

August 18, 2004

Export Citation:

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Assignee:

DAIKIN IND LTD (JP)
NAKAMURA SHINGO (JP)
MINAMI SHINICHI (JP)
KANEMURA TAKASHI (JP)
ITANO MITSUSHI (JP)
KEZUKA TAKEHIKO (JP)
KAMIYA FUMIHIRO (JP)

International Classes:

C09K13/08; C23F1/44; (IPC1-7): C23F1/30; H01L21/306

Foreign References:

JPH1167632A	1999-03-09
JP2002353443A	2002-12-06
JP2004079990A	2004-03-11

Attorney, Agent or Firm:

Saegusa, Eiji (1-7-1 Doshomachi, Chuo-ku, Osaka-sh, Osaka 45, JP)

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