Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/099156
Kind Code:
A1
Abstract:
Provided is a magnetic sensor comprising the following: magnetic convergence plates 200; Hall elements 201, 202 which are respectively disposed on one surface of each of the magnetic convergence plates; wires N402, N404, N406, N408 which are connected to the Hall elements 201, 202; and a signal processing circuit 303 which is connected to the wires and which receives signals from the Hall elements. Between Hall element 201 (202) and the signal processing circuit, two of the wires N402, N404 (N406, N408) intersect in such a manner that the wires are spaced apart from each other in the depth direction of a substrate, and between the intersection of the two wires and the circuit, a compensation loop S501 (S502) is formed. At least a portion of the region occupied by the compensation loop is covered by the magnetic convergence plate in a depth-direction plan view. Induced electromotive force produced in closed loops S401, S402 formed by the wires and including the Hall elements is compensated using the compensation loops.
Inventors:
NOBIRA RYUJI (JP)
NAKAMURA TAKENOBU (JP)
NAKAMURA TAKENOBU (JP)
Application Number:
PCT/JP2016/086463
Publication Date:
June 15, 2017
Filing Date:
December 07, 2016
Export Citation:
Assignee:
ASAHI KASEI MICRODEVICES CORP (JP)
International Classes:
G01R33/02; G01R33/07; H01L43/06
Domestic Patent References:
| WO2013065266A1 | 2013-05-10 |
Foreign References:
| JP2012047708A | 2012-03-08 | |||
| JP2006214815A | 2006-08-17 | |||
| JPS54178570U | 1979-12-17 | |||
| JP2012150003A | 2012-08-09 |
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
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