MEMS SENSOR

WIPO Patent Application WO/2010/032819

A1

Provided is an MEMS sensor which specifically suppresses noise and the like and has excellent electrical stability. The MEMS sensor has a conductive first substrate (1), a conductive second substrate (2), and a conductive functional layer (10) which is arranged between the first substrate and the second substrate and has a movable electrode section and a fixed electrode section.  Supporting conductive sections (12, 14, 17, 19) of the movable electrode section and the fixed electrode section are fixedly supported by having first insulating layers (3a, 3b, 3c) formed on a surface (1a) of the first substrate (1) between the supporting conductive sections and the substrate.  The functional layer is provided with a frame layer (25) which surrounds the movable electrode section and the fixed electrode section.  The first substrate (1), the second substrate (2) and the frame layer (25) are at the same potential.

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KIKUIRI KATSUYA (JP)
GOCHO HIDEKI (JP)
YAMADA MINORU (JP)
TAKAHASHI TORU (JP)
KOBAYASHI KIYOSHI (JP)
SATO KIYOSHI (JP)
YAZAWA HISAYUKI (JP)
KOBAYASHI TOSHIHIRO (JP)

PCT/JP2009/066353

March 25, 2010

September 18, 2009

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ALPS ELECTRIC CO LTD (JP)
KIKUIRI KATSUYA (JP)
GOCHO HIDEKI (JP)
YAMADA MINORU (JP)
TAKAHASHI TORU (JP)
KOBAYASHI KIYOSHI (JP)
SATO KIYOSHI (JP)
YAZAWA HISAYUKI (JP)
KOBAYASHI TOSHIHIRO (JP)

G01P15/125; G01P15/08; H01L29/84

JP2004311951A	2004-11-04
JP2002273699A	2002-09-25
JP2003240797A	2003-08-27
JP2008135690A	2008-06-12
JP2001227902A	2001-08-24
JP2000307018A	2000-11-02
JP2007311392A	2007-11-29

NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)

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