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Title:
METHOD AND APPARATUS FOR CURVATURE-ADAPTIVE CLUSTER MAGNETORHEOLOGICAL POLISHING OF FREE CURVED SURFACE
Document Type and Number:
WIPO Patent Application WO/2023/000414
Kind Code:
A1
Abstract:
Disclosed are a method and a device for curvature-adaptive cluster magnetorheological polishing of a free curved surface. The polishing method comprises the following steps: placing a workpiece to be processed in a rotating platform assembly, such that each polishing head is located above the workpiece to be processed; pouring a magnetorheological polishing solution into the rotating platform assembly; causing each polishing head to rotate synchronously; rotating the workpiece to be processed by means of the rotating platform assembly, and starting polishing; during the polishing process, moving the polishing head up and down to perform constant-pressure polishing; a y-direction linear guide rail assembly driving the rotating platform assembly to move horizontally and reciprocatingly in the y direction at a low speed, causing the workpiece to be processed to be uniformly polished. The present invention can fully meet the requirements for polishing a free curved surface, ensures constant-force processing while increasing the processing efficiency, reduces non-uniformity of processing, and is very suitable for high-efficiency and ultra-precision polishing of optical elements, semiconductors, ceramics and other materials having a free curved surface.

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Inventors:
PAN JISHENG (CN)
YAN QIUSHENG (CN)
BAI XIANTING (CN)
ZHENG QIONGBIN (CN)
CAI MANDAN (CN)
Application Number:
PCT/CN2021/112375
Publication Date:
January 26, 2023
Filing Date:
August 13, 2021
Export Citation:
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Assignee:
UNIV GUANGDONG TECHNOLOGY (CN)
International Classes:
B24B13/00; B24B1/00
Foreign References:
CN103042438A2013-04-17
CN108311958A2018-07-24
CN105328516A2016-02-17
CN212095823U2020-12-08
CN203019159U2013-06-26
CN111283482A2020-06-16
CN101224556A2008-07-23
JP2006224227A2006-08-31
KR20100084778A2010-07-28
Attorney, Agent or Firm:
YOGO PATENT AND TRADEMARK AGENCY LIMITED COMPANY (CN)
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