Title:
METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEVICE, METHOD FOR SYNTHESIZING IMAGE OF IRRADIATION TARGET, PROGRAM, RECORDING MEDIUM, AND ELECTRON BEAM APPLICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/038824
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a method for creating detection data for outputting detection data for which an electron beam application device itself has effectively used a gradation range. The method for creating detection data comprises at least two detection data output steps. A first detection data output step includes a first electron beam irradiation step, a first detection step for generating a detection signal, a first light amount adjustment step, a step for repeating said steps, and a first output step. A second detection data output step includes: a first histogram computation step for setting gradation value-light source intensity correlation values which associate light source intensities and a gradation value and for computing, from the first detection data, the frequency of appearance of irradiation spots having each gradation value-light source intensity correlation value, the gradation value-light source intensity correlation values being set by assigning a light source intensity within a first light source range with respect to each gradation value, or by assigning a gradation value within a gradation range with respect to each light source intensity of a first light source intensity range, on the basis of the number of gradation values when synthesizing an image of an irradiation region or the number of gradation values in a synthesized image of the irradiation region and a first light source intensity range; a second detection condition setting step for setting the amount of radiation that enters a detector to a second value, and/or for setting a light source to a second light source intensity range on the basis of the computed histogram, in order to enable effective use of the gradation range; a second electron beam irradiation step based on the set second detection condition; a second detection step for generating a detection signal; a second light amount adjustment step; a step for repeating said steps; and a second output step. Thus, the method for creating detection data solves the above problem.
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Inventors:
NISHITANI TOMOHIRO (JP)
ARAKAWA YUTA (JP)
YASUFUKU DAISUKE (JP)
ARAKAWA YUTA (JP)
YASUFUKU DAISUKE (JP)
Application Number:
PCT/JP2023/029237
Publication Date:
February 22, 2024
Filing Date:
August 10, 2023
Export Citation:
Assignee:
PHOTO ELECTRON SOUL INC (JP)
International Classes:
H01J37/075; H01J37/22
Foreign References:
| JP6968481B1 | 2021-11-17 | |||
| JP2007329081A | 2007-12-20 | |||
| JP2001243907A | 2001-09-07 | |||
| JP2005174555A | 2005-06-30 | |||
| JP2008066312A | 2008-03-21 | |||
| JP2004273419A | 2004-09-30 | |||
| US9002097B1 | 2015-04-07 |
Attorney, Agent or Firm:
MATSUMOTO Seiji (JP)
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