Title:
METHOD AND DEVICE FOR MEASURING DISPLACEMENT DISTRIBUTION USING REGULAR PATTERN, AND PROGRAM FOR SUCH METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/008404
Kind Code:
A1
Abstract:
With regard to the conventional means of a sampling moire method that enables fine displacement distribution measurement by generating moire fringe using a regular fringe pattern, a cosine wave in which the white to black ratio is 1:1, or a rectangular wave pattern, and then calculating the phase difference distribution of the moire fringe before and after transformation by analyzing the phase information of the moire fringe, there is a problem in that such method is unsuitable for nano/micro materials or large structures, or a problem in that if a conventional analysis method is applied to a regular pattern in which there is discretionary repetition of at least two cycles, large errors are generated. The present invention improves on such method by using the phase information of a plurality of frequency components or using moire fringe of high-order frequencies generated using discretionary regular patterns that have one dimensional or two dimensional repetition and are artificially produced on the surface of an object or already present on the surface of the object, and the present invention succeeds in improving measurement accuracy and dramatically increasing the range of the measureable scale.
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Inventors:
RI SHIEN (JP)
TSUDA HIROSHI (JP)
TSUDA HIROSHI (JP)
Application Number:
PCT/JP2013/082701
Publication Date:
January 22, 2015
Filing Date:
December 05, 2013
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
International Classes:
G01B11/00; G01B11/16; G01B11/25
Foreign References:
| JP2012107896A | 2012-06-07 | |||
| JP2011174874A | 2011-09-08 | |||
| JP2011064482A | 2011-03-31 |
Other References:
YOSHIHARU MORIMOTO: "Displacement and Strain Distribution Measurement by Sampling Moire Method", JOURNAL OF THE VACUUM SOCIETY OF JAPAN, vol. 54, no. 1, 20 January 2011 (2011-01-20), pages 32 - 38
Y. MORIMOTO: "Whole-field Optical Systems and Image Processing Techniques for Shape and Deformation Measurements", PROCEEDINGS OF SEM XITH INTERNATIONAL CONGRESS & EXPOSITION ON EXPERIMENTAL & APPLIED MECHANICS, June 2008 (2008-06-01)
S. RI: "Accurate and fast in-plane displacement measurement method for large-scale structures by utilizing repeated pattern", PROCEEDINGS OF SPIE, vol. 8692, 19 April 2013 (2013-04-19), pages 86922F
Y. MORIMOTO: "Whole-field Optical Systems and Image Processing Techniques for Shape and Deformation Measurements", PROCEEDINGS OF SEM XITH INTERNATIONAL CONGRESS & EXPOSITION ON EXPERIMENTAL & APPLIED MECHANICS, June 2008 (2008-06-01)
S. RI: "Accurate and fast in-plane displacement measurement method for large-scale structures by utilizing repeated pattern", PROCEEDINGS OF SPIE, vol. 8692, 19 April 2013 (2013-04-19), pages 86922F
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