Title:
METHOD FOR MANUFACTURING ORGANIC DEPOSITION FILM, AND ORGANIC ELECTROLUMINESCENCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/114225
Kind Code:
A1
Abstract:
[Problem] To provide a method for manufacturing an organic vapor deposition film whereby the amounts of organic vapor deposition materials deposited on a substrate can be precisely controlled. [Solution] The present invention has: a preparation step for preparing a vapor deposition film manufacturing device 1 having a chamber 2 inside which a vacuum state is maintained, n vapor deposition sources 3 including organic vapor deposition materials 31 to be emitted into the chamber 2, and n emission rate sensors 4 for measuring the emission rate of the organic vapor deposition materials 31 corresponding to the n vapor deposition sources 3; a pre-step for calculating the mix ratio of each organic vapor deposition material 31 with respect to each emission rate sensor 4 using the vapor deposition film manufacturing device 1; and a vapor deposition step for emitting all of the organic vapor deposition materials 31 simultaneously into the chamber 2 and thereby forming an organic vapor deposition film on the surface of a substrate 5 introduced into the chamber 2.
Inventors:
IIZUKA KINGO (JP)
HIDA KANAKO (JP)
KAKIUCHI RYOUHEI (JP)
HIDA KANAKO (JP)
KAKIUCHI RYOUHEI (JP)
Application Number:
PCT/JP2016/050441
Publication Date:
July 21, 2016
Filing Date:
January 08, 2016
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
C23C14/12; C23C14/24; C23C14/54; H01L51/50; H05B33/10
Domestic Patent References:
| WO2013111599A1 | 2013-08-01 |
Foreign References:
| JP2015001013A | 2015-01-05 | |||
| JP2012107287A | 2012-06-07 | |||
| JP2004079528A | 2004-03-11 |
Attorney, Agent or Firm:
MAKOTO INTERNATIONAL PATENT ATTORNEYS OFFICE (JP)
Patent business corporation Makoto Patent Attorneys Office (JP)
Patent business corporation Makoto Patent Attorneys Office (JP)
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