Title:
MULTI-MODE SHAPE MEASUREMENT DEVICE, AND MULTI-MODE SHAPE MEASUREMENT METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2024/005484
Kind Code:
A1
Abstract:
The present invention relates to a multi-mode shape measurement device and a multi-mode shape measurement method using same. The multi-mode shape measurement device is characterized by comprising: a light source; a selective interferometer which splits the light source to selectively form an interferometer with a beam traveling toward a sample and a beam traveling toward a reference mirror; and a spectrometer disposed at the rear of the selective interferometer and splits a beam containing surface information of the sample, wherein, when the interferometer is formed by the selective interferometer, the surface information of the sample is obtained by a dispersive interferometer mode, and when the interferometer is not formed by the selective interferometer, the surface information of the sample is obtained by a reflected light mode that obtains information of a beam reflected by the sample.
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Inventors:
HAN SANGJUN (KR)
PARK SANG SOO (KR)
CHOI SEONGGYU (KR)
PARK SANG SOO (KR)
CHOI SEONGGYU (KR)
Application Number:
PCT/KR2023/008862
Publication Date:
January 04, 2024
Filing Date:
June 26, 2023
Export Citation:
Assignee:
AUROS TECH INC (KR)
International Classes:
G01B11/24; G01B9/02; G01B11/06; G01J3/02; G01J3/26; G01J3/28; G01J3/45; G01J9/02
Foreign References:
| KR20170142240A | 2017-12-28 | |||
| KR20120114778A | 2012-10-17 | |||
| KR20060052004A | 2006-05-19 | |||
| KR20210108198A | 2021-09-02 | |||
| KR20130084718A | 2013-07-26 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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