Title:
NARROW BAND LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/134745
Kind Code:
A1
Abstract:
A narrow band laser device outputs pulsed laser light by causing a plurality of burst oscillations including a first burst oscillation and a second burst oscillation caused after the first burst oscillation. The narrow band laser device may be provided with: laser resonators; a chamber disposed between the laser oscillators; a pair of electrodes disposed in the chamber; a power supply which applies a pulsed voltage to the pair of electrodes; a wavelength selection element disposed in the laser oscillator; a spectrum width variable unit disposed in the laser oscillator; a wavelength variable unit which modifies a wavelength selected by the wavelength selection element; and a control unit which controls the wavelength variable unit on the basis of a control amount of the spectrum width variable unit between the end of the first burst oscillation and the start of the second burst oscillation,.
Inventors:
FURUSATO HIROSHI (JP)
OHTA TAKESHI (JP)
KOUNO NATSUHIKO (JP)
WAKABAYASHI OSAMU (JP)
KUMAZAKI TAKAHITO (JP)
OHTA TAKESHI (JP)
KOUNO NATSUHIKO (JP)
WAKABAYASHI OSAMU (JP)
KUMAZAKI TAKAHITO (JP)
Application Number:
PCT/JP2016/053068
Publication Date:
August 10, 2017
Filing Date:
February 02, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/137
Foreign References:
| JP2008527683A | 2008-07-24 | |||
| JP2008098282A | 2008-04-24 | |||
| JP2001307997A | 2001-11-02 | |||
| JP2003051633A | 2003-02-21 | |||
| JP2001196679A | 2001-07-19 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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