OXIDE SINTERED BODY AND SPUTTERING TARGET

Title:

OXIDE SINTERED BODY AND SPUTTERING TARGET

Document Type and Number:

WIPO Patent Application WO/2014/042139

Kind Code:

A8

Abstract:

An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and X-ray diffraction of the oxide sintered body shows that a Zn2SnO4 phase and an InGaZnO4 phase are contained in a prescribed proportion.

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Inventors:

TAO YUKI
KANAMARU MORIYOSHI
NAMBU AKIRA
HATA HIDEO

Application Number:

PCT/JP2013/074340

Publication Date:

March 12, 2015

Filing Date:

September 10, 2013

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Assignee:

KOBELCO RES INST INC (JP)

International Classes:

C04B35/453; C04B35/00; C23C14/34; H01L21/363

Attorney, Agent or Firm:

HAMADA Yuriko et al. (Toranomon East Bldg. 10F 7-13, Nishi-Shimbashi 1-chome, Minato-k, Tokyo 03, JP)

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