Title:
PELLICLE FRAME GRIPPING DEVICE AND PELLICLE FRAME GRIPPING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/133054
Kind Code:
A1
Abstract:
The present invention enables a pellicle frame to be gripped without the intervention of an operator even when there is distortion in the pellicle frame, for example.
Two bars 213, 214 held substantially horizontally with a predetermined separation are each provided with a plurality of pellicle gripping members, each of the pellicle gripping members having a measurement portion that continuously acquires the height of the pellicle gripping member and the height of a groove formed in a side surface of a pellicle 100. When a container body 11 is moved upward and the heights of the pellicle gripping members and the height of the groove substantially coincide, the pellicle gripping members are inserted into the groove and, once the pellicle gripping members have been inserted into the groove, the container body 11 is moved downward.
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Inventors:
SUGIMOTO SHIGETO (JP)
Application Number:
PCT/JP2016/054317
Publication Date:
August 25, 2016
Filing Date:
February 15, 2016
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
H01L21/677; B65D85/86; G03F1/62; G03F1/66
Foreign References:
| JP2014098913A | 2014-05-29 | |||
| JP2013125120A | 2013-06-24 | |||
| JP2011017833A | 2011-01-27 | |||
| JP2007017811A | 2007-01-25 | |||
| JPH05323583A | 1993-12-07 |
Attorney, Agent or Firm:
SAKATA Yukari (JP)
Sakata Connection (JP)
Sakata Connection (JP)
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