Title:
PELLICLE
Document Type and Number:
WIPO Patent Application WO/2023/038140
Kind Code:
A1
Abstract:
The objective is to provide a pellicle which less likely generates outgas. A pellicle (10) of the present disclosure comprises a pellicle frame (14), a pellicle film (12) supported on one end face of the pellicle frame (14), and an adhesive layer (15) provided on the other end face of the pellicle frame (14). A degree of swelling of the adhesive layer (15) expressed in the following formula (A) is not more than 200%. Formula A: [(Mass after immersion of a 10 mg test piece collected from the adhesive layer) / 10 mg] × 100
In formula (A), the mass after immersion denotes the mass of the test piece after immersing the test piece for 6 hours in 10 ml of decane solution with a capillary column GC concentration of at least 99.0%.
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Inventors:
ITO KEN (JP)
SATOH YASUSHI (JP)
UNEZAKI TAKASHI (JP)
ONO YOSUKE (JP)
SATOH YASUSHI (JP)
UNEZAKI TAKASHI (JP)
ONO YOSUKE (JP)
Application Number:
PCT/JP2022/034109
Publication Date:
March 16, 2023
Filing Date:
September 12, 2022
Export Citation:
Assignee:
MITSUI CHEMICALS INC (JP)
International Classes:
G03F1/62; C09J7/38; C09J133/04
Domestic Patent References:
| WO2020196836A1 | 2020-10-01 |
Foreign References:
| JP2011113033A | 2011-06-09 | |||
| JP2000194121A | 2000-07-14 | |||
| JP2016167070A | 2016-09-15 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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