Title:
PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/230552
Kind Code:
A1
Abstract:
Provided is a physical quantity sensor which outputs, when a physical quantity is applied, a signal according to the physical quantity and is provided with: a support substrate (11) having one surface (11a); a fixing member (20) partially fixed to the support substrate on one surface thereof; an operation unit (30) having driving spindles (33, 34), detection spindles (35, 36), and a detection unit (60); and a driving unit 50 which vibrates the driving spindles, wherein the detection unit generates, when a physical quantity is applied while the driving spindles are driving-vibrated, an electrical output based on the movement of the detection spindles accompanied by the application of the physical quantity. The fixing member comprises: a fixing part (21) connected to the support substrate; and floating parts (22) extending from the fixing part to both sides of the fixing part, with the fixing part therebetween. The floating parts are disposed to be spaced apart from the support substrate with a gap therebetween in a normal direction to one surface thereof and are in a floated state, and the operation unit is supported by portions of both end sides of at least the floating parts with the fixing part therebetween.
Inventors:
JOMORI TOMOYA (JP)
Application Number:
PCT/JP2019/020442
Publication Date:
December 05, 2019
Filing Date:
May 23, 2019
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01C19/5747; H01L29/84
Foreign References:
| JP2017026636A | 2017-02-02 | |||
| JP2010096538A | 2010-04-30 | |||
| JPH11325915A | 1999-11-26 | |||
| JP2014006238A | 2014-01-16 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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