Title:
PIEZOELECTRIC SENSOR AND MANUFACTURING METHOD THEREFOR, AND DETECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/001390
Kind Code:
A1
Abstract:
A piezoelectric sensor and a manufacturing method therefor, and a detection apparatus, which relate to the technical field of sensing. The piezoelectric sensor comprises: an array substrate (101); a first cover layer (102) located on the array substrate (101), the first cover layer (102) comprising a first portion (1021) and a second portion (1022), wherein the first portion (1021) covers the array substrate (101), and a cavity (106) and a first opening (1023) are provided between the second portion (1022) and the array substrate (101); a first electrode (103) located above the first cover layer (102) and above the cavity (106); a piezoelectric film (104) located on the first electrode (103); and a second electrode (105) located on the piezoelectric film (104).
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Inventors:
NIU JING (CN)
ZHOU TINGTING (CN)
ZHANG FANGZHEN (CN)
PENG JINTAO (CN)
ZHOU TINGTING (CN)
ZHANG FANGZHEN (CN)
PENG JINTAO (CN)
Application Number:
PCT/CN2021/093318
Publication Date:
January 06, 2022
Filing Date:
May 12, 2021
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L41/08; G01D5/14; H01L41/113; H01L41/22; H01L41/29
Foreign References:
| CN111725384A | 2020-09-29 | |||
| US20130113577A1 | 2013-05-09 | |||
| CN109993156A | 2019-07-09 | |||
| CN108270414A | 2018-07-10 | |||
| CN1383610A | 2002-12-04 | |||
| CN101024481A | 2007-08-29 |
Attorney, Agent or Firm:
CCPIT PATENT AND TRADEMARK LAW OFFICE (CN)
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