Title:
PLASMA SOURCE OF DIRECTED BEAMS AND APPLICATION THEREOF TO MICROLITHOGRAPHY
Document Type and Number:
WIPO Patent Application WO2005038822
Kind Code:
A3
Abstract:
The invention relates to a method for generating radiation in a range of desired wavelengths in a direction of emission. According to said method, initial radiation is produced by a radiation source, the wavelengths thereof including said desired range, and said initial radiation is filtered in such a way as to substantially eliminate the initial radiation beams having a wavelength outside the desired range. The inventive method is characterised in that the filtering is carried out by setting up a controlled distribution of the refractive index of the beams in a control region through which the initial radiation passes, in such a way as to selectively deviate the beams of the initial radiation according to the wavelength thereof and to recover the beams having desired wavelengths. The invention also relates to an associated device.
Inventors:
CHOI PETER (FR)
Application Number:
PCT/FR2004/002656
Publication Date:
December 08, 2005
Filing Date:
October 18, 2004
Export Citation:
Assignee:
EPPRA (FR)
CHOI PETER (FR)
CHOI PETER (FR)
International Classes:
G03F7/20; G21K1/06; H05G2/00; (IPC1-7): G21K1/06; H05G2/00
Foreign References:
| EP0528542A2 | 1993-02-24 | |||
| US20030058429A1 | 2003-03-27 | |||
| US20010055364A1 | 2001-12-27 | |||
| US5812631A | 1998-09-22 | |||
| US20020021782A1 | 2002-02-21 | |||
| US4219705A | 1980-08-26 |
Other References:
BORISOV A B ET AL: "Relativistic and charge-displacement self-channeling of intense ultrashort laser pulses in plasmas", PHYS. REV. A, STAT. PHYS. PLASMAS FLUIDS RELAT. INTERDISCIP. TOP. (USA), PHYSICAL REVIEW A (STATISTICAL PHYSICS, PLASMAS, FLUIDS, AND RELATED INTERDISCIPLINARY TOPICS), USA, vol. 45, no. 8, 15 April 1992 (1992-04-15), pages 5830 - 5845, XP002285829, ISSN: 1050-2947
BOLTON P R ET AL: "Propagation of intense, ultrashort laser pulses through preionized plasma slabs", J. OPT. SOC. AM. B, OPT. PHYS. (USA), JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B (OPTICAL PHYSICS), OPT. SOC. AMERICA, USA, vol. 14, no. 2, February 1997 (1997-02-01), pages 437 - 443, XP002285830, ISSN: 0740-3224
TSUDA N ET AL: "Physical properties of dense plasma produced by XeCl excimer laser in high-pressure argon gases", JPN. J. APPL. PHYS. 1, REGUL. PAP. SHORT NOTES REV. PAP. (JAPAN), JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 (REGULAR PAPERS, SHORT NOTES & REVIEW PAPERS), PUBLICATION OFFICE, JAPANESE JOURNAL APPL. PHYS, JAPAN, vol. 38, no. 6A, June 1999 (1999-06-01), pages 3712 - 3715, XP002285831, ISSN: 0021-4922
BOLTON P R ET AL: "Propagation of intense, ultrashort laser pulses through preionized plasma slabs", J. OPT. SOC. AM. B, OPT. PHYS. (USA), JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B (OPTICAL PHYSICS), OPT. SOC. AMERICA, USA, vol. 14, no. 2, February 1997 (1997-02-01), pages 437 - 443, XP002285830, ISSN: 0740-3224
TSUDA N ET AL: "Physical properties of dense plasma produced by XeCl excimer laser in high-pressure argon gases", JPN. J. APPL. PHYS. 1, REGUL. PAP. SHORT NOTES REV. PAP. (JAPAN), JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 (REGULAR PAPERS, SHORT NOTES & REVIEW PAPERS), PUBLICATION OFFICE, JAPANESE JOURNAL APPL. PHYS, JAPAN, vol. 38, no. 6A, June 1999 (1999-06-01), pages 3712 - 3715, XP002285831, ISSN: 0021-4922
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