Title:
POLISHING APPARATUS, POLISHING METHOD, AND CASSETTE
Document Type and Number:
WIPO Patent Application WO/2021/251242
Kind Code:
A1
Abstract:
According to the present invention, it is possible to autonomously replace a polishing tape. The present invention comprises: a stage on which a workpiece is mounted; a polishing head unit provided above the stage in the plumb vertical direction; a cassette having a polishing tape provided therein, the cassette being detachably provided to the polishing head unit; a cassette holding part to which the cassette is provided; a transport unit that transports the cassette between the polishing head unit and the cassette holding part; and a securing part provided to the polishing head unit, the securing part securing the cassette to the polishing head unit. The securing part has a rod-form part and an actuator that causes the rod-form part to move between a position contacting the cassette and a position not contacting the cassette. The cassette has a first reel on which a pre-usage polishing tape is wound, a second reel on which a post-usage polishing tape is wound, and a frame inside of which the first reel and the second reel are provided. The polishing head unit has a first drive shaft inserted into the first reel, and a second drive shaft inserted into the second reel. In a state in which the first drive shaft is inserted into the first reel and the second drive shaft is inserted into the second reel, the securing part presses the cassette using the rod-form part and secures the cassette to the polishing head unit.
Inventors:
YAMAMURO TSUYOSHI (JP)
Application Number:
PCT/JP2021/021030
Publication Date:
December 16, 2021
Filing Date:
June 02, 2021
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
B24B21/18; B24B21/00; B24B45/00
Foreign References:
| JP2003266292A | 2003-09-24 | |||
| DE4236029A1 | 1994-04-28 |
Attorney, Agent or Firm:
SAKATA Yukari (JP)
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