Title:
POLISHING METHOD FOR REMOVING SPHERICAL CROWN-SHAPED BUMP ON SURFACE OF NODULAR DEFECT OF OPTICAL THIN FILM
Document Type and Number:
WIPO Patent Application WO/2023/184634
Kind Code:
A1
Abstract:
The present invention relates to the field of optical thin films, mainly aims at a nodular defect for reducing an optical thin film damage threshold, and particularly relates to a method for improving a thin film laser damage threshold by removing a spherical crown-shaped bump on the surface of a nodular defect. The method provided by the present invention comprises: using a smooth surface having roughness less than that of a thin film element as a polishing surface; by using a liquid having good wettability, forming a liquid film between the polishing surface and the surface of the thin film, a capillary force generated by the liquid film being the positive pressure acting on the surface of the thin film; and removing the nodular bump on the film surface by means of a friction force during a relative sliding process of the polishing surface and the film surface. The present invention uses a smooth surface and a liquid having good wettability for removing nodular bumps on the surface of a thin film, so that electric field enhancement caused by the nodular defect is reduced, and the laser damage threshold of the thin film element is improved without affecting the spectral performance of the thin film. Compared with an existing method for improving the laser damage threshold of an optical thin film, the present invention has characteristics such as simple operation, low cost, and broad application range.
More Like This:
| JP2013519863 | Equipment for heat-treating the substrate |
| JP2013069679 | METHOD FOR MANUFACTURING TRANSPARENT CONDUCTIVE FILM |
Inventors:
ZHU MEI PING (CN)
LIU TIAN BAO (CN)
DU WEN YUN (CN)
LI JING PING (CN)
SHAO JIANDA (CN)
LIU TIAN BAO (CN)
DU WEN YUN (CN)
LI JING PING (CN)
SHAO JIANDA (CN)
Application Number:
PCT/CN2022/089449
Publication Date:
October 05, 2023
Filing Date:
April 27, 2022
Export Citation:
Assignee:
SHANGHAI INST OPTICS & FINE MECH CAS (CN)
International Classes:
C23C14/58; B24B1/00
Foreign References:
| CN106903424A | 2017-06-30 | |||
| CN111379009A | 2020-07-07 | |||
| CN1632023A | 2005-06-29 | |||
| CN104498887A | 2015-04-08 | |||
| CN105200389A | 2015-12-30 | |||
| CN101310922A | 2008-11-26 | |||
| US20150276993A1 | 2015-10-01 |
Attorney, Agent or Firm:
SHANGHAI HENGHUI INTELLECTUAL PROPERTY AGENCY (CN)
Download PDF: