PROCESS FOR PRODUCING CARBON NANOTUBE

Title:

PROCESS FOR PRODUCING CARBON NANOTUBE

Document Type and Number:

WIPO Patent Application WO/2007/116434

Kind Code:

A1

Abstract:

In a provided process for producing a carbon nanotube, a fine ruggedness is formed on a substrate surface. A catalytic metal layer of given thickness is formed on the rugged surface, and heat treatment is conducted at given temperature so as to convert the catalytic metal layer into isolated multiple microparticles. The microparticles of the catalytic metal have a uniform particle diameter, and the distribution thereof is uniform. The substrate carrying the multiple microparticles is disposed in a carbonaceous gas atmosphere, and according to the CVD method using a carbonaceous gas, carbon nanotubes are grown on the microparticles of the catalytic metal. Carbon nanotubes of desired diameter with desired layer multiplicity can be provided with high reproducibility.

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Inventors:

KONDO DAIYU (JP)
KAWABATA AKIO (JP)
SATO SHINTARO (JP)
IWAI TAISUKE (JP)
NIHEI MIZUHISA (JP)

Application Number:

PCT/JP2006/306628

Publication Date:

October 18, 2007

Filing Date:

March 30, 2006

Export Citation:

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Assignee:

FUJITSU LTD (JP)
KONDO DAIYU (JP)
KAWABATA AKIO (JP)
SATO SHINTARO (JP)
IWAI TAISUKE (JP)
NIHEI MIZUHISA (JP)

International Classes:

B82B3/00; C01B31/02

Foreign References:

JP2005059167A	2005-03-10
JPH0931757A	1997-02-04
JPH1111917A	1999-01-19
JP2004051432A	2004-02-19
JP2005212093A	2005-08-11
JP2004359478A	2004-12-24

Other References:

ZHANG R.Y. ET AL.: "Chemical Vapor Deposition of Single-Walled Carbon Nanotubes Using Ultrathin Ni/Al Film as Catalyst", NANO LETTERS, AMERICAN CHEMICAL SOCIETY, vol. 3, no. 6, 2003, pages 731 - 735, XP003018504

Attorney, Agent or Firm:

DOI, Kenji et al. (Doi & Associates,3rd Floor, Toshou-Bldg. No.3,3-9-5, Shin-yokohama,Kohoku-ku, Yokohama-shi, Kanagawa 33, JP)

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