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Title:
REAGENT FOR ENHANCING GENERATION OF CHEMICAL SPECIES
Document Type and Number:
WIPO Patent Application WO/2015/049871
Kind Code:
A1
Abstract:
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

Inventors:
ENOMOTO SATOSHI (JP)
Application Number:
PCT/JP2014/005039
Publication Date:
April 09, 2015
Filing Date:
October 02, 2014
Export Citation:
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Assignee:
TOYO GOSEI CO LTD (JP)
International Classes:
C09K3/00; G03F7/004; H01L21/027
Domestic Patent References:
WO2012135286A22012-10-04
WO2004107051A22004-12-09
WO2009047152A12009-04-16
Foreign References:
JP2013517345A2013-05-16
US20110008732A12011-01-13
JP2010059067A2010-03-18
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (Iwasaki Bldg. 6F 3-15, Hiroo 1-chome, Shibuya-k, Tokyo 12, JP)
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