Title:
RECORDING SYSTEM, RECORDING DEVICE, AND RECORDING CONTROL SIGNAL GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/116741
Kind Code:
A1
Abstract:
[PROBLEMS] To correct various errors which may be caused in each recording device
and prevent distortion of a recording pattern. [MEANS FOR SOLVING PROBLEMS]
A signal generation unit (30) of a formatter (100) inputs a deviation amount
(δ) inherent to each recording device (10) and recording data (RD) in a
recording signal correction device (47). The recording signal correction
device (47) correcting a beam unit (33) and rotation/feed drive units (37A, 37B)
according to them and generates a beam deflection signal (Vbeamm) and a substrate
speed signal (Vsubm). Thus, it is possible to perform correction in accordance
with an error (mechanical error) based on an assembling dimension accuracy of
each part which may be different in the respective recording devices (10) and
each controller control accuracy.
Inventors:
KASONO OSAMU (JP)
HOSODA YASUO (JP)
HOSODA YASUO (JP)
Application Number:
PCT/JP2007/056411
Publication Date:
October 18, 2007
Filing Date:
March 27, 2007
Export Citation:
Assignee:
PIONEER CORP (JP)
KASONO OSAMU (JP)
HOSODA YASUO (JP)
KASONO OSAMU (JP)
HOSODA YASUO (JP)
International Classes:
H01L21/027; G03F7/20
Foreign References:
| JP2004303794A | 2004-10-28 | |||
| JP2003078591A | 2003-03-14 | |||
| JP2000207738A | 2000-07-28 | |||
| JP2003029421A | 2003-01-29 | |||
| JPH07106222A | 1995-04-21 |
Attorney, Agent or Firm:
MASUDA, Hirofumi (1-7-13 Higashiueno, Taito-ku Tokyo 15, JP)
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