Title:
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2022/168363
Kind Code:
A1
Abstract:
The method for manufacturing a resonance device (1) includes: preparing an aggregate substrate (100) which has a plurality of first power supply terminals (ST1) electrically connected to respective upper electrodes (125) of a plurality of resonators (10) and a first linking wiring-line (LL) for electrically connecting at least two of the first power supply terminals (ST1); and dividing the aggregate substrate (100) into a plurality of resonance devices (1). Each of the first power supply terminals (ST1) comprises a first metal layer (ML1) and a second metal layer (ML2) that convers the first metal layer (ML1). The first linking wiring-line (LL) comprises a portion extending from a region of the first metal layer (ML1) covered with the second metal layer (ML2). The method further includes removing the portion extending from the region of the first metal layer (ML1) covered with the second metal layer (ML2) before the dividing of the aggregate substrate (100) into the resonance devices (1).
Inventors:
FUKUMITSU MASAKAZU (JP)
HIGUCHI YOSHIYUKI (JP)
HIGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2021/035307
Publication Date:
August 11, 2022
Filing Date:
September 27, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H3/007; H03H3/013; H03H9/24
Domestic Patent References:
| WO2018235339A1 | 2018-12-27 |
Foreign References:
| JP2006186566A | 2006-07-13 | |||
| JP2016152476A | 2016-08-22 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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