Title:
SAMPLE HOLDING TOOL
Document Type and Number:
WIPO Patent Application WO/2018/180329
Kind Code:
A1
Abstract:
This sample holding tool 10 comprises: an insulating substrate 1 made of a ceramic material and having a sample holding surface 11 as one main surface thereof; heat-generating resistors 2 provided to the other main surface of the insulating substrate 1; an adhesive layer 4 covering the other main surface of the insulating substrate 1; and a metal member 3 provided on the other main surface of the insulating substrate 1 with the adhesive layer 4 interposed therebetween. The adhesive layer 4 has a first layer 41 contacting the insulating substrate 1 and a second layer 42 contacting the metal member 3. The second layer 42 has a lower elastic modulus than the first layer 41 and has a layer-shaped part positioned between the first layer 41 and the metal member 3 and an annular part surrounding the first layer 41.
More Like This:
Inventors:
HORI YOUHEI (JP)
Application Number:
PCT/JP2018/008942
Publication Date:
October 04, 2018
Filing Date:
March 08, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| WO2016035878A1 | 2016-03-10 | |||
| WO2016060205A1 | 2016-04-21 | |||
| WO2012147931A1 | 2012-11-01 |
Foreign References:
| JP2011091297A | 2011-05-06 | |||
| JP2015079785A | 2015-04-23 | |||
| JP2013009001A | 2013-01-10 | |||
| JP2006080389A | 2006-03-23 |
Download PDF: