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Title:
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2014/156919
Kind Code:
A1
Abstract:
The present invention has a memory cell region in which memory cells are aligned in a first direction (Y direction) and a second direction (X direction) orthogonal to the first direction, a word line contact region adjacent to the memory cell region in the first direction (Y direction) interposed by a dummy pattern region, and first and second word lines that span a plurality of active regions aligned in the first direction (Y direction) and extend from the memory cell region to the word line contact region. A first word line and a second word line adjacent to each other within one active region located in the memory cell region constitute a word line pair. A gap in the second direction (X direction) between a first word line and a second word line that constitute a word line pair in the memory cell region is narrower than a gap in the second direction (X direction) in the word line contact region.

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JP2001158964SEMICONDUCTOR SYSTEM
WO/2009/096001SEMICONDUCTOR STORAGE DEVICE AND MEMORY EMBEDDED SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF
Inventors:
YOSHINO HIROSHI (JP)
KAWAGUCHI GOU (JP)
Application Number:
PCT/JP2014/057667
Publication Date:
October 02, 2014
Filing Date:
March 20, 2014
Export Citation:
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Assignee:
PS4 LUXCO SARL (LU)
YOSHINO HIROSHI (JP)
KAWAGUCHI GOU (JP)
International Classes:
H01L21/8242; H01L21/3205; H01L21/768; H01L27/108
Foreign References:
JP2008091927A2008-04-17
JP2006108510A2006-04-20
JP2013008768A2013-01-10
JPH02208964A1990-08-20
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (JP)
Noriyasu Ikeda (JP)
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