Title:
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/069340
Kind Code:
A1
Abstract:
The present invention provides a semiconductor device which comprises a transistor of a very small size. This semiconductor device comprises first and second transistors; the first transistor comprises first to third conductive layers, a first semiconductor layer and a first insulating layer; the second conductive layer is arranged on the first conductive layer; the first semiconductor layer is in contact with the upper surface of the first conductive layer and the second conductive layer; the first insulating layer is in contact with the upper surface of the first semiconductor layer; the third conductive layer is arranged on the first semiconductor layer and the first insulating layer; the second transistor comprises fourth to sixth conductive layers, a second semiconductor layer and the first conductive layer; the fifth conductive layer is arranged on the fourth conductive layer; the second semiconductor layer is in contact with the upper surface of the fourth conductive layer and the fifth conductive layer; the first insulating layer is in contact with the upper surface of the second semiconductor layer; the sixth conductive layer is arranged on the second semiconductor layer and the first insulating layer; a second insulating layer is arranged between the first and second conductive layers and between the fourth and fifth conductive layers; and the thickness of the second insulating layer between the first and second conductive layers is different from the thickness of the second insulating layer between the fourth and fifth conductive layers.
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Inventors:
KIMURA HAJIME (JP)
YAMAZAKI SHUNPEI (JP)
YAMAZAKI SHUNPEI (JP)
Application Number:
PCT/IB2023/059428
Publication Date:
April 04, 2024
Filing Date:
September 25, 2023
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB (JP)
International Classes:
H01L29/786; G02F1/1368; H01L21/28; H01L21/336; H01L29/41; H01L29/417; H01L29/423; H01L29/49; H05B33/02; H10B12/00; H10B41/70; H10B99/00; H10K50/10
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