Title:
SEMICONDUCTOR OPTICAL MODULATION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2016/194369
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a Mach-Zehnder (MZ) type semiconductor optical modulation element usable as an ultrafast modulator having excellent electrical stability. The present invention provides a semiconductor optical modulation element, which is a Mach-Zehnder type semiconductor optical modulation element that modulates light using a refractive index modulation region for modulating the refractive index of the light guided to an optical waveguide and an input and output region for multi/demultiplexing the light split in the refractive index modulation region, said semiconductor optical modulation element being characterized in that: in the refractive index modulation region of the optical waveguide, an n-type clad layer, an i core layer, and a p-type clad layer are laminated from top to bottom in that order on the substrate surface equivalent to the (100) plane of a sphalerite-type semi-insulating semiconductor crystal substrate; and the n-type clad layer is formed in a ridge shape along a reverse-mesa direction, and a capacity charged electrode is provided on the n-type clad layer.
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Inventors:
OGISO YOSHIHIRO (JP)
OZAKI JOSUKE (JP)
KASHIO NORIHIDE (JP)
KIKUCHI NOBUHIRO (JP)
KOHTOKU MASAKI (JP)
OZAKI JOSUKE (JP)
KASHIO NORIHIDE (JP)
KIKUCHI NOBUHIRO (JP)
KOHTOKU MASAKI (JP)
Application Number:
PCT/JP2016/002649
Publication Date:
December 08, 2016
Filing Date:
June 01, 2016
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE (JP)
International Classes:
G02F1/025; G02F1/225
Foreign References:
| JP2012168356A | 2012-09-06 | |||
| US6647158B2 | 2003-11-11 | |||
| JPH08122719A | 1996-05-17 | |||
| US20140199014A1 | 2014-07-17 |
Other References:
KAISER,R. ET AL.: "High Performance Travelling Wave Mach-Zehnder Modulators for Emerging Generations of High Capacity Transmitter Components", ICTON, 2013, pages 1 - 4, XP032484271
OGISO,Y. ET AL.: "waveguide stripe direction n-i-p-n heterostructrue InP optical modulator", ELECTRONICS LETTERS, vol. 50, no. 9, 24 April 2014 (2014-04-24), pages 688 - 690, XP006046962
OGISO,Y. ET AL.: "waveguide stripe direction n-i-p-n heterostructrue InP optical modulator", ELECTRONICS LETTERS, vol. 50, no. 9, 24 April 2014 (2014-04-24), pages 688 - 690, XP006046962
Attorney, Agent or Firm:
TANI & ABE, p. c. (JP)
Patent business corporation A valley and Abe patent firm (JP)
Patent business corporation A valley and Abe patent firm (JP)
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